At present, most of the mechanically functional hard films (especially the films used for cutting tools) in the world use cathodic arc deposition technology. Application performance; especially the domestically manufactured cathodic arc deposition equipment particle problem is particularly serious. The introduction of magnetic filtration technology on the basis of this technology can solve the problem of particles deposited on the surface, but the deposition efficiency is only about 1/10 of the original, and the deposition area is small, so that the production cycle is long, the manufacturing cost is high, and it is not suitable for mass coating. production applications. The surface of the film prepared by the magnetron sputtering technology is smooth and delicate, the deposition rate is moderate, and the film can be uniformly deposited in a large area. However, the magnetron sputtering technology also has a low ionization rate (generally 10%), and the prepared film is not as good as the film prepared by the cathodic arc technology in terms of hardness, wear resistance and bonding force; chemical reactive coating is carried out. (such as TiN, TiO2), due to the low ionization rate and poor reactivity of metal particles, reactive gas must be introduced in excess, causing poisoning (chemical reaction) of the magnetron target surface, causing a series of avalanches such as a sharp reduction in the evaporation rate. As a result, the magnetron sputtering reactive coating is unstable and uncontrollable.

Therefore, there are multi-functional ion vacuum coating machines on the market. Through a large number of experiments and industrial applications, the project has reached the following conclusions:

(1) The designed multi-functional ion coating machine with multiple coating technologies is successful, and the comprehensive performance of the established coating system is in a leading position in China.

(2) The equipment can prepare diamond-like film and metal nitrogen (or carbon) compound multi-layer film with smooth and dense surface, smooth and delicate surface, and excellent performance in large area and low cost.

(3) The use of a special multi-layer gradient intermediate transition layer and doping technology reduces the internal stress, improves the film/substrate bonding force, and is conducive to the growth of the film layer (up to 6mm thick).

(4) The prepared DLC film has excellent comprehensive properties: hardness>20GPa (up to 37.25GPa), adjustable thickness (up to 6mm thick), film/base bonding force>50N (up to 100N), friction coefficient <0.2 , the film is smooth and delicate.

(5) The developed matrix/Cr/CrN/CrTiAlN/CrTiAlCN/CrTiC/DLC multi-layer wear-resistant and heat-resistant self-lubricating coating has good comprehensive properties: the hardness is up to 28.7GPa, the thickness is adjustable from 1-4mm, and the film The /base bonding force is greater than 70N, and the friction coefficient is less than 0.2.

(6) The developed wear-resistant and anti-friction film has been successfully applied to a variety of high-precision molds and precision key components. The application results show that the surface strengthening effect of the film layer is remarkable, which can greatly improve the product quality and service life.

Stainless Steel Metal Tribological Coating Machine

Multi arc ion plating introduces various gas discharge modes into the field of vapor deposition under vacuum situation. The whole vapor deposition process is carried out in plasma process. It can be coated not only on the surface of metal products, but also on the surface of non-metal products. It can be plated with metal film, Titanium nitride, titanium carbide, zirconium nitride, chromium nitride, titanium oxide and other films.