What is the effect of cathode surface contamination of multi-arc cathode ion coater- Ningbo Honyu Vacuum Technology Co., Ltd.

Under the same discharge conditions of multi-arc cathodes (such as the same arc ignition voltage, the same working atmosphere and the same vacuum degree, etc.), the ion-coated cathodes with very clean surfaces (such as the cathodes that have been burnt) are relatively clean during arc ignition. Difficult, but it is easy to strike a multi-arc cathode with contamination on the surface (eg, the cathode surface is coated with dirt).

Obviously, when the cathode surface of the multi-arc cathode ion coater is contaminated, it will be more likely to produce electron emission on the surface. Generally speaking, the dirt itself contains a variety of components, some elements are easy to emit electrons, and on the other hand, the reduction of the work function of electrons on the surface of the contaminated cathode is also more likely to produce electron emission. Cathode target sources (especially new targets) of multi-arc equipment usually contain initial contamination (such as adsorbed oxygen, etc.) on the surface. Since oxygen can emit a large number of electrons, initial arcing is more likely to occur in contaminated places until the surface contamination is evaporated The normal target evaporation begins only after completion.

Therefore, during the assembly process of the target source of the multi-arc cathode ion coating machine, it should be ensured that the assembly is carried out in a clean state, and the surface of the cathode multi-arc target, especially the non-evaporative surfaces such as side surfaces, cathode bases, and shields, should not be polluted. , to prevent arcing on the non-evaporating surface, and improve the stability and reliability of the target source operation. In addition, the large number of small holes on the cathode surface can also cause serious disturbance to the arc combustion stability.

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