MODEL |
HY-1214 |
HY-1416 |
HY-1618 |
HY-2020 |
CHAMBER SIZE |
Ø1200*1400mm |
Ø1400*1600mm |
Ø1600*1800mm |
Ø2000*2000mm |
CHAMBER STRUCTURE |
Vertical single door, horizontal single door, vertical double door |
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COATING METHOD |
Ion with bias technology |
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ULTIMATE VACUUM |
8.0*10-4Pa (empty load) |
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VACUUM TIME |
Empty load from atmosphere to 5.0E-2 less than 15min |
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CONSUMPTION MATERIAL |
Titanium, chromium, zirconium, iron, titanium & aluminum alloy, all type MF and DC sputtering targets. |
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COATING COLOR |
translucent, gold, silver, rose gold, black, dark black, green, blue, purple, rainbow, TiN, ZrN, TiAlN, TiC, TiCN, CrN, Al2O3, etc |
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CONTROL METHOD |
Full auto, semi-auto, manual, PLC touch screen |
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SPECIAL REQUIREMENTS |
Customized |